RF MEMS Capacitors Market | Latest Analysis, Demand Trends, Growth Forecast

RF MEMS Capacitors Adoption Expands Across 5G Infrastructure, Defense Radar Modules, and Tunable RF Front-End Architectures

RF MEMS capacitors are increasingly being integrated into tunable RF front-end modules, adaptive impedance matching networks, phased-array radar systems, satellite communication terminals, and reconfigurable filters used in advanced wireless electronics. The RF MEMS Capacitors Market is estimated at nearly USD 420 million in 2026, supported by rising deployment of mmWave radios, electronically steerable antennas, and multi-band communication systems requiring low insertion loss and high linearity. Demand concentration remains heavily tied to telecom OEMs, defense electronics integrators, RF semiconductor companies, aerospace contractors, and high-frequency module suppliers operating in the United States, China, Japan, South Korea, and parts of Western Europe.

Customer concentration in the RF MEMS Capacitors Market remains relatively narrow compared to conventional passive electronic components. A significant portion of demand originates from companies manufacturing RF front-end modules for 5G base stations, military radar systems, satellite payloads, and aerospace-grade communication electronics. Telecom infrastructure vendors, including companies supplying massive MIMO radios and beamforming systems, account for a major share of commercial consumption. In parallel, defense procurement programs linked to AESA radar modernization continue to support demand for highly reliable MEMS-based tuning components capable of operating at high frequencies with low signal distortion.

“RF system miniaturization is increasing demand for tunable passive components capable of operating efficiently at higher frequencies. This keeps RF MEMS Capacitors closely associated with RF MEMS Inductors, where integrated passive MEMS architectures are becoming more common in compact RF modules. The market also overlaps with RF MEMS Resonators supporting signal tuning and frequency stability applications. Increasing complexity in wireless communication systems is further strengthening linkage with RF MEMS Filters. “

RF MEMS Capacitors Market Demand Linked to Multi-Band Wireless Hardware Expansion

The transition toward multi-band and tunable RF architectures has substantially increased the relevance of RF MEMS capacitors in compact wireless systems. Conventional semiconductor varactors face limitations in linearity and power handling under high-frequency operation, especially in mmWave applications above 24 GHz. RF MEMS capacitors are increasingly selected in tunable filters and impedance matching circuits because of lower harmonic distortion and lower energy loss.

Global 5G infrastructure expansion remains one of the largest demand generators. During March 2025, China’s Ministry of Industry and Information Technology reported deployment of more than 4.4 million 5G base stations nationwide, with continued investment toward 5G-Advanced network densification. This scale of infrastructure deployment directly increases consumption of RF front-end tuning components, beamforming modules, and adaptive RF systems where RF MEMS capacitors are utilized for frequency agility and signal optimization.

In North America, telecom infrastructure investments continue supporting advanced RF hardware procurement. In February 2026, the U.S. Federal Communications Commission expanded spectrum allocation initiatives for upper mid-band and mmWave frequencies to accelerate next-generation wireless capacity deployment. Wider use of 28 GHz and 39 GHz infrastructure is increasing the requirement for tunable passive components capable of supporting low-loss high-frequency operation.

Demand is also being reinforced by satellite communication equipment manufacturers. Low Earth Orbit satellite networks require electronically tunable RF systems capable of operating across multiple frequency bands under constrained power conditions. RF MEMS capacitors are increasingly being incorporated into phased-array antennas and adaptive filtering modules used in SATCOM terminals.

Defense Electronics Procurement Driving High-Reliability RF MEMS Capacitor Integration

Defense applications account for a disproportionately high revenue contribution within the RF MEMS Capacitors Market because military-grade systems require higher qualification standards and more complex RF architectures. AESA radar systems, electronic warfare platforms, airborne communication systems, and missile guidance electronics continue adopting tunable RF technologies to improve spectral flexibility and reduce signal degradation.

The United States remains the largest defense-driven demand center. In April 2025, the U.S. Department of Defense expanded procurement allocations for next-generation radar and electronic warfare systems under multiple aerospace programs exceeding USD 13 billion collectively. These systems increasingly rely on RF front-end miniaturization and tunable RF modules where MEMS capacitors provide advantages in switching speed, low leakage, and frequency control.

European defense modernization is also contributing to demand growth. France, Germany, and the United Kingdom have accelerated radar upgrade programs connected to NATO air defense expansion. During September 2025, Germany approved additional defense electronics procurement funding exceeding EUR 3.5 billion for airborne sensing and electronic warfare capability enhancement. Such investments support suppliers manufacturing RF subsystems, phased-array antennas, and microwave communication modules incorporating MEMS-enabled tuning devices.

Japan and South Korea are witnessing rising defense electronics spending focused on naval radar and missile detection systems. Japan’s defense budget for fiscal 2026 surpassed JPY 8.5 trillion, with considerable allocation toward integrated sensing and advanced communication platforms. These developments continue strengthening demand for high-frequency passive devices capable of operating under harsh environmental conditions.

Smartphone RF Front-End Complexity Increasing Component Opportunities

Although RF MEMS capacitors occupy a smaller share of smartphone RF bill-of-materials compared to filters and power amplifiers, increasing RF complexity in premium smartphones is opening selective opportunities. Modern flagship smartphones support dozens of frequency bands, carrier aggregation, Wi-Fi 7, ultra-wideband connectivity, and increasingly sophisticated antenna tuning systems.

Global smartphone shipments recovered moderately during 2025 and continued improving into 2026, particularly in premium 5G device categories. Semiconductor content per smartphone continues increasing because advanced RF front-end architectures require additional tuning, filtering, and impedance control capabilities. RF MEMS capacitors are gaining attention for dynamic antenna tuning applications where low power consumption and low insertion loss improve signal efficiency.

China remains a major electronics manufacturing center influencing downstream RF MEMS capacitor demand. During November 2025, major Chinese smartphone OEMs and RF module suppliers expanded procurement contracts for high-frequency front-end components to support domestic premium handset production. Increasing domestic semiconductor substitution initiatives in China are also encouraging local RF component ecosystem development, including MEMS-based RF technologies.

Taiwan continues playing a critical role because of its concentration of RF semiconductor packaging and module assembly operations. Outsourced semiconductor assembly and test providers, RF module manufacturers, and advanced substrate suppliers collectively support the integration ecosystem for RF MEMS devices. Demand concentration in Taiwan is therefore closely linked to export-oriented smartphone and networking equipment manufacturing.

Aerospace Communication Systems and SATCOM Infrastructure Supporting RF MEMS Capacitors Market Expansion

Satellite communication infrastructure is emerging as one of the most technically relevant growth areas for the RF MEMS Capacitors Market. Electronically steerable antennas used in aviation connectivity, defense communication, maritime broadband, and satellite internet terminals increasingly require tunable RF architectures with low signal attenuation.

In January 2026, the European Space Agency announced additional funding commitments toward next-generation satellite communication payload development programs supporting high-throughput and adaptive communication architectures. RF MEMS capacitors are relevant in these systems because they enable compact tunable networks operating across Ku-band, Ka-band, and emerging higher-frequency communication ranges.

Commercial aviation connectivity upgrades are also supporting demand. Airlines are increasingly deploying high-throughput satellite terminals to support broadband connectivity and real-time aircraft data systems. These terminals rely on phased-array antennas and compact RF front-end modules where low-loss tunable capacitors are important for maintaining signal efficiency.

The Middle East is gradually emerging as a niche demand center because of large-scale satellite communication and defense modernization programs. Saudi Arabia and the United Arab Emirates continue investing in domestic aerospace electronics and secure communication systems. In June 2025, Saudi Arabia announced additional investment commitments exceeding USD 2 billion for localized defense and aerospace manufacturing initiatives, indirectly supporting regional procurement of advanced RF subsystems.

Asia-Pacific Manufacturing Concentration Shapes RF MEMS Supply and Demand Balance

Asia-Pacific dominates manufacturing activity associated with RF MEMS capacitors because the region combines semiconductor fabrication infrastructure, advanced packaging ecosystems, RF module production, and consumer electronics assembly capacity. Japan remains technologically important because of strong expertise in MEMS fabrication equipment, specialty materials, and precision semiconductor manufacturing.

South Korea’s role is strongly linked to advanced smartphone production and telecom equipment manufacturing. Samsung Electronics and domestic RF component suppliers continue increasing investment in advanced RF front-end integration technologies supporting next-generation mobile devices and network infrastructure.

China’s semiconductor investment intensity continues affecting the RF MEMS Capacitors Market ecosystem. During 2025 and 2026, multiple Chinese provincial governments expanded semiconductor manufacturing support programs focused on RF chips, compound semiconductors, and MEMS device localization. These investments are improving regional manufacturing capability for advanced RF components, though high-end MEMS reliability qualification still remains concentrated among established suppliers in the United States, Japan, and parts of Europe.

In Europe, demand remains concentrated in aerospace, automotive radar, industrial communication, and defense electronics sectors. Automotive radar systems operating at 77 GHz are creating incremental opportunities for RF MEMS technologies, particularly in adaptive sensing architectures supporting autonomous driving and advanced driver-assistance systems. Germany continues leading this segment because of its concentration of automotive electronics suppliers and radar development programs.

The RF MEMS Capacitors Market therefore remains closely tied to a relatively specialized but rapidly expanding ecosystem built around advanced RF communication, defense sensing, satellite connectivity, and high-frequency semiconductor integration rather than broad commodity passive electronics demand.

RF MEMS Capacitors Market Technology Evolution Closely Linked to mmWave RF Architectures and Tunable Front-End Integration

Technology evolution has become a central factor in the RF MEMS Capacitors Market because performance requirements in modern RF systems increasingly exceed the practical operating limits of conventional semiconductor tuning components. RF front-end systems supporting 5G-Advanced, satellite communication, phased-array radar, Wi-Fi 7, and defense electronics are now operating across wider bandwidths, higher frequencies, and more complex multi-band environments. This transition is pushing OEMs toward low-loss tunable technologies capable of maintaining signal integrity under dense RF conditions.

RF MEMS capacitors have gained relevance because they provide significantly lower insertion loss compared with semiconductor varactors in high-frequency operation. In mmWave communication systems, even small reductions in signal loss materially improve antenna efficiency and thermal management. As telecom OEMs increase deployment of 28 GHz, 39 GHz, and emerging sub-THz research platforms, RF front-end designers are increasingly evaluating MEMS-based tunable components for impedance matching and adaptive filtering applications.

The transition toward reconfigurable RF hardware is especially visible in phased-array antenna systems. Traditional fixed-frequency architectures are becoming less attractive for military communication, SATCOM, and advanced wireless infrastructure because operators increasingly require frequency agility and dynamic spectrum optimization. RF MEMS capacitors support this transition by enabling electronically tunable RF paths without introducing substantial power penalties.

In March 2025, the U.S. National Telecommunications and Information Administration expanded advanced spectrum-sharing initiatives involving upper-band frequencies to improve utilization efficiency in defense and commercial wireless systems. This type of spectrum optimization effort directly increases interest in adaptive RF architectures, including tunable filters and antenna matching systems where RF MEMS capacitors are technically advantageous.

Material and Packaging Innovations Reshaping RF MEMS Capacitor Reliability

One of the major historical limitations associated with RF MEMS devices involved long-term reliability under thermal cycling and environmental stress. Recent improvements in wafer-level packaging, hermetic sealing, and thin-film material engineering are reducing these concerns and expanding commercial adoption potential.

Advanced packaging technologies are becoming increasingly important because RF MEMS capacitors are highly sensitive to contamination, humidity, and mechanical instability. Semiconductor packaging firms in Taiwan, Japan, and the United States are investing heavily in wafer-level encapsulation technologies designed specifically for high-frequency MEMS devices.

Glass cap wafer packaging, silicon-on-insulator substrates, and advanced thin-film deposition methods are improving switching reliability and reducing stiction-related failure rates. These developments are especially important for aerospace and defense qualification, where operating lifetimes often exceed 15 years under harsh environmental conditions.

Japan continues playing a critical role in materials and fabrication technologies supporting the RF MEMS Capacitors Market ecosystem. Japanese suppliers maintain strong positions in specialty ceramics, silicon wafers, sputtering targets, and MEMS fabrication equipment required for precision RF device manufacturing. During October 2025, Japan expanded support under semiconductor supply chain resilience initiatives targeting advanced component manufacturing and next-generation packaging technologies, strengthening domestic MEMS manufacturing capability.

The integration of RF MEMS components with compound semiconductor technologies is another important shift. Gallium nitride and RF SOI platforms are increasingly being combined with MEMS-based tuning architectures in advanced communication modules. This convergence improves overall RF efficiency in high-power and high-frequency systems used in telecom infrastructure and defense radar applications.

OEM Ecosystem Expanding Around Adaptive RF Front-End Platforms

The OEM ecosystem surrounding RF MEMS capacitors is broader than the component segment itself. Demand is generated through a layered supply chain involving telecom equipment vendors, defense electronics integrators, RF semiconductor manufacturers, SATCOM equipment providers, automotive radar suppliers, foundries, OSAT companies, and advanced packaging specialists.

Telecom infrastructure OEMs remain among the most influential commercial customers. Massive MIMO radios and beamforming systems require increasingly complex RF front-end architectures with dynamic tuning capability. Network densification programs in China, the United States, South Korea, and India continue increasing procurement of high-frequency RF modules.

During January 2026, India’s Department of Telecommunications accelerated domestic 5G infrastructure expansion programs covering additional urban and industrial clusters. Expansion of Open RAN and domestic telecom manufacturing initiatives is gradually increasing local sourcing opportunities for RF subsystem suppliers and related MEMS-enabled tuning technologies.

Defense OEM ecosystems remain concentrated in the United States and Europe. Aerospace companies manufacturing radar systems, electronic warfare platforms, and secure communication equipment increasingly require compact tunable RF modules capable of supporting wideband operation. RF MEMS capacitors are therefore becoming part of next-generation subsystem design strategies rather than standalone component procurement decisions.

Automotive radar suppliers are also entering the RF MEMS ecosystem more aggressively. Advanced driver-assistance systems and autonomous sensing platforms increasingly operate at 77 GHz and higher frequencies. Radar module miniaturization and thermal efficiency improvements are encouraging evaluation of MEMS-based tuning technologies for adaptive sensing architectures.

Market Segmentation Highlights Across RF Frequency, End-Use Industry, and Integration Architecture

Segmentation Highlights

• By Frequency Range
  • Below 6 GHz
  • 6 GHz–24 GHz
  • Above 24 GHz/mmWave
• By Application
  • Tunable Filters
  • Antenna Tuning
  • Impedance Matching Networks
  • Phase Shifters
  • Resonators and Oscillators
• By End-Use Industry
  • Telecom Infrastructure
  • Aerospace & Defense
  • Consumer Electronics
  • Automotive Radar
  • Satellite Communication
  • Industrial RF Systems
• By Integration Type
  • Monolithic RF MEMS Capacitors
  • Hybrid Integrated RF MEMS Capacitors
  • Wafer-Level Packaged RF MEMS Devices
• By OEM Category
  • Telecom Equipment OEMs
  • RF Semiconductor Companies
  • Defense Electronics Integrators
  • SATCOM Equipment Manufacturers
  • Automotive Electronics Suppliers

Telecom infrastructure remains the largest commercial application segment because 5G radio deployment continues requiring advanced beamforming and adaptive frequency management systems. However, aerospace and defense applications contribute disproportionately higher revenue per device because qualification standards and reliability requirements increase component value.

The above-24-GHz segment is expanding rapidly due to mmWave deployment in telecommunications and advanced radar systems. Demand for these frequency bands is also being reinforced by Wi-Fi 7 adoption and emerging 6G research activity. During 2025, multiple telecom equipment manufacturers increased investment into sub-THz wireless testing platforms to evaluate future ultra-high-capacity communication systems. These initiatives are increasing long-term demand visibility for tunable RF technologies.

RF MEMS Capacitors Production Dynamics Concentrated in Asia and North America

Production concentration in the RF MEMS Capacitors Market remains relatively specialized because manufacturing requires both MEMS fabrication expertise and RF performance optimization capability. Unlike commodity passive components, RF MEMS capacitors involve complex microfabrication, precision packaging, and high-frequency characterization processes that limit the number of qualified manufacturers.

The United States remains one of the most important technology development centers. American companies maintain strong positions in defense-grade RF MEMS design, aerospace applications, and advanced semiconductor R&D. DARPA-supported RF technology programs and defense electronics procurement continue supporting domestic innovation in adaptive RF systems.

However, large-scale manufacturing activity is heavily concentrated in Asia-Pacific. Taiwan plays a central role because of its advanced semiconductor foundry infrastructure and RF packaging ecosystem. Taiwanese OSAT companies and RF module assemblers support integration of MEMS components into communication hardware exported globally.

South Korea’s production role is closely tied to smartphone RF module integration and telecom infrastructure equipment manufacturing. Domestic electronics giants continue investing in advanced RF front-end integration technologies supporting Wi-Fi 7 devices, AI-enabled smartphones, and next-generation wireless infrastructure.

China continues expanding domestic MEMS manufacturing capacity as part of broader semiconductor localization initiatives. Several provincial investment programs launched during 2025 focused on RF semiconductor and MEMS supply chain development. Although China is increasing manufacturing scale, high-performance aerospace-grade and defense-qualified RF MEMS production still remains dominated by companies operating in the United States, Japan, and Europe.

Europe maintains strategic importance in automotive radar and aerospace electronics production. Germany and France continue supporting semiconductor and advanced electronics manufacturing through public funding initiatives linked to industrial sovereignty objectives. In July 2025, the European Commission approved additional semiconductor investment support mechanisms under the European Chips Act framework, including funding for advanced MEMS and sensor technologies relevant to RF applications.

RF MEMS Capacitors Market Share Structure Remains Concentrated Among Specialized RF and MEMS Technology Companies

The RF MEMS Capacitors Market remains moderately consolidated because manufacturing complexity, RF reliability requirements, and packaging precision create high technical barriers for new entrants. Unlike standard MLCC or silicon capacitor markets, RF MEMS capacitors require expertise in MEMS fabrication, RF front-end integration, thin-film deposition, wafer-level packaging, and high-frequency testing. As a result, market participation is concentrated among a relatively limited group of RF semiconductor companies, MEMS specialists, defense-oriented suppliers, and tunable RF technology developers.

A substantial share of commercial activity remains linked to tunable RF front-end solutions used in smartphones, phased-array antennas, military communication systems, satellite payloads, and adaptive filtering modules. Market share distribution is therefore influenced not only by standalone component shipments, but also by integration into RF subsystems and proprietary front-end architectures.

The competitive environment is characterized by a combination of established RF semiconductor suppliers and specialized MEMS innovators. Large RF component companies maintain stronger customer access and manufacturing scale, while smaller MEMS-focused firms often lead in tunable capacitor intellectual property and advanced RF switching technologies.

Qorvo Maintains Strong Position Through RF Front-End and Tunable RF Ecosystem Integration

Qorvo remains among the most influential participants connected to the RF MEMS Capacitors Market ecosystem because of its extensive RF front-end portfolio serving smartphones, telecom infrastructure, aerospace, and defense applications. The company’s strengths are concentrated in RF filters, tuners, amplifiers, and integrated front-end modules supporting 5G and advanced wireless communication systems.

Qorvo’s broader RF ecosystem presence gives it strategic leverage in tunable RF architectures where MEMS-based technologies are increasingly relevant. The company maintains strong relationships with smartphone OEMs, wireless infrastructure suppliers, and defense contractors. Integration capability across RF SOI, GaAs, and advanced packaging technologies continues supporting its competitive position in adaptive RF solutions.

The company’s market influence increased further with continuing demand growth in high-frequency wireless systems and defense radar electronics. Expansion of mmWave deployment and Wi-Fi 7 infrastructure continues increasing RF front-end complexity, supporting demand for tunable RF solutions integrated into compact modules.

WiSpry Technology Continues Influencing Tunable RF MEMS Capacitor Architectures

WiSpry remains one of the most recognized companies historically associated with RF MEMS tunable capacitor technologies. The company developed tunable digital capacitor arrays focused on antenna tuning, impedance matching, tunable filters, and adaptive RF front-end applications.

Its RF MEMS capacitor technology was designed specifically to improve tunability while reducing insertion loss compared with traditional silicon-based approaches. WiSpry’s technology portfolio has been particularly associated with mobile communication systems and programmable RF architectures supporting multi-band wireless operation.

The company’s MEMS-based tunable digital capacitor arrays gained relevance as smartphone RF complexity increased due to carrier aggregation, multi-band connectivity, and antenna miniaturization. Integration of tunable RF architectures became increasingly important in premium mobile devices where space optimization and power efficiency directly impact RF front-end design decisions.

AAC Technologies’ ownership structure further strengthened the manufacturing and integration ecosystem surrounding WiSpry technologies, especially within Asian smartphone supply chains and antenna module manufacturing.

Menlo Micro Expanding MEMS RF Switching and Satellite Communication Capabilities

Menlo Micro has emerged as a major MEMS-focused RF technology company with strong visibility in RF switching and satellite communication applications. While the company is more strongly associated with MEMS RF switches than standalone capacitor products, its technologies are closely aligned with the broader RF MEMS Capacitors Market ecosystem because of shared fabrication approaches, packaging technologies, and RF subsystem integration trends.

Menlo Micro’s RF solutions are increasingly positioned for aerospace communication systems, phased-array antennas, tactical radios, and SATCOM infrastructure where low insertion loss and reduced SWaP requirements are critical. The company’s technology is gaining traction in electronically steerable antenna systems and wideband RF communication platforms.

During October 2025, the company highlighted the role of MEMS RF switching technologies in improving satellite communication platform efficiency and reducing size, weight, and power burdens in spacecraft and tactical communication systems. These trends are directly connected with the broader adoption trajectory for RF MEMS tuning technologies.

Analog Devices and Defense RF Ecosystem Suppliers Retain Strategic Influence

Analog Devices continues maintaining influence in advanced RF subsystem ecosystems through high-frequency signal processing, RF transceivers, microwave components, and aerospace-grade electronics. Analog Devices has historically participated in RF MEMS-related research ecosystems and maintains strong exposure to radar, instrumentation, and defense communication systems associated with MEMS-enabled RF architectures.

The company’s strategic importance is linked to integration capabilities across microwave signal chains rather than discrete MEMS capacitor volume production alone. Aerospace radar modernization and electronic warfare upgrades continue benefiting suppliers with strong RF subsystem portfolios.

Defense-oriented RF suppliers in the United States and Europe continue representing an important portion of high-value demand because qualification standards for military RF systems remain significantly higher than for commercial consumer electronics.

Market Share Dynamics Influenced by OEM Qualification and Packaging Expertise

The RF MEMS Capacitors Market differs from commodity passive component industries because qualification cycles are lengthy and customer switching rates remain relatively low once RF architectures are validated. Telecom OEMs, defense contractors, and satellite communication companies typically require extensive reliability validation before introducing MEMS-based RF tuning technologies into commercial platforms.

This creates an advantage for companies with:

• Established RF packaging expertise
• Proven wafer-level encapsulation capability
• Long-cycle aerospace qualification experience
• Strong relationships with telecom and defense OEMs
• Access to advanced MEMS foundry infrastructure

The United States continues dominating high-value RF MEMS intellectual property and defense-grade design capability, while Asia-Pacific remains central to volume manufacturing, module integration, and RF front-end assembly. Taiwan, South Korea, and Japan collectively account for a substantial portion of advanced RF packaging and semiconductor integration activity associated with MEMS-enabled RF components.

China is gradually increasing domestic MEMS RF capability through semiconductor localization programs. Several Chinese RF semiconductor firms and MEMS startups expanded investments during 2025 and 2026 targeting tunable RF modules, phased-array systems, and advanced wireless infrastructure components. However, high-reliability aerospace-grade MEMS RF production remains concentrated among established U.S., Japanese, and European technology providers.

Recent Industry Developments and RF MEMS Ecosystem Expansion

• In October 2025, Menlo Micro highlighted expanded deployment opportunities for MEMS RF switching technologies in satellite communication systems and phased-array antenna architectures focused on reducing SWaP constraints in aerospace platforms.
• During 2025, China accelerated domestic RF semiconductor and MEMS localization initiatives tied to advanced wireless infrastructure and defense electronics manufacturing, increasing investment into RF front-end and tunable communication technologies.
• In 2025, telecom infrastructure suppliers across North America and Asia increased investment into mmWave and Wi-Fi 7 RF front-end architectures, supporting broader adoption of adaptive RF tuning technologies associated with MEMS-based capacitors and switches.
• Japan expanded semiconductor and advanced packaging support programs during late 2025 focused on MEMS fabrication, RF packaging, and high-frequency semiconductor process capability, strengthening regional production ecosystems for RF MEMS technologies.
• European aerospace and radar modernization programs accelerated during 2025, particularly in Germany and France, increasing procurement activity for high-frequency RF subsystems, phased-array electronics, and adaptive communication hardware compatible with RF MEMS architectures.